3 edition of design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control found in the catalog.
design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control
Loren W. Linholm
by U.S. Dept. of Commerce, National Bureau of Standards, For sale by the Supt. of Docs., U.S. G.P.O. in Washington, D.C
Written in English
|Statement||Loren W. Linholm ; sponsored by U.S. Air Force ... [et al.].|
|Series||NBS special publication ;, 400-66, Semiconductor measurement technology|
|Contributions||United States. National Engineering Laboratory. Electron Devices Division., United States. National Bureau of Standards.|
|LC Classifications||QC100 .U57 no. 400-66, TK7874 .U57 no. 400-66|
|The Physical Object|
|Pagination||v, 142 p. :|
|Number of Pages||142|
|LC Control Number||81600078|
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